MEC-Tech

MEC-Tech We provide micro-environment control solutions for your equipment.

The customizable precision level is up to: temperature control (±0.005℃), air pressure difference (±0.5 Pa), humidity (±0.5%RH), cleanliness (IOS Class 1), noise (＜55dB(A)) , etc.

30/10/2025

Wuhan MECT Advances AI-Driven R&D Application

Wuhan Micro-environment Control Technology Co.,Ltd. recently equipped ChatGPT professional accounts for all its R&D personnel, marking the comprehensive implementation of the company’s AI empowerment strategy. The company’s journey in AI application began in mid-2024, when it established an academic research department within the R&D center as a pioneer in AI technology application, systematically exploring the potential of AI application in the fields of micro-environment control and thermal management. After one year of pilot validation, the academic research department achieved significant progress in key scenarios such as technical literature retrieval , solution design optimization, cross-disciplinary knowledge integration, etc. This greatly enhances R&D efficiency and lays a solid foundation for the full promotion of AI application. The provision of ChatGPT Professional accounts to all R&D personnel signifies the transformation of AI tools from "exploration by a few" to "productivity tools for all."

Wuhan MECT specializes in providing micro-environment control solution for semiconductor manufacturing equipment, serving top equipment manufactures in areas such as projection lithography machines, coater-developers, metrology tools, bonding equipment, optical inspection system, etc. The company achieves ultra-high-precision control for temperature, humidity, cleanliness, air pressure, noise and electromagnetic shielding , providing critical technology support for the localization of semiconductor equipment.


Please contact us:
+86 181 8642 5308
[email protected]

30/09/2025

Wuhan Micro-Environment Control Technology Co.,Ltd. recently completed Pre-A round financing of tens of millions of RMB, marking its second round of financing after the Angle round. The fund will be primarily allocated to new technology R&D and expansion of product manufacturing capacity. The company has successfully launched China's first electromagnetic shielding micro-environment control system specifically designed for electron beam lithography systems , and developed a complete micro-environment control system for a specific model of domestic front-end lithography machine. For cutting-edge equipment and instruments such as lithography machines, coaters/developers, metrology tools, bounding equipment, optical inspection systems, the company provides complete micro-environment system and a series of supporting products. These systems achieve an air temperature stability of ±5 mK, liquid and solid temperature stability of ±1 mK, humidity stability of ±0.4% RH, air pressure stability of ±1 Pa, magnetic field fluctuations for electromagnetic shielding of 30 nT, and a cleanliness level of ISO Class1.

Please contact us:
+86 181 8642 5308
[email protected]

30/07/2025

The 4th Anniversary of Wuhan MECT’s Incorporation
July 2025 marks the 4th incorporation milestone of Wuhan Micro-Environment Control Technology Co., Ltd. Since its founding in July 2021,the company has evolved from a 6-member startup into a high-tech enterprise with over 50 specialists through 4 years of relentless dedication. We have developed a complete micro-environment control system for a domestic front-end lithography machine, successfully launched the China's inaugural electromagnetic shielded Micro-Environment System engineered for E-beam lithography, pioneered the industry’s first constant-temperature FFU. Continuously addressing the demands for Micro-Environment system of the leading-edge equipment and instrument, including lithography, metrology and inspection equipment, die bonders, coater/developers and optical inspection instruments. We empower clients to overcome complex MEC challenges and accelerate R&D process of client’s leading-edge equipment and instrument.
Please contact us:
+86 181 8642 5308
[email protected]

Wuhan MECT specializes in the research of measurement and control technology of micro-environmental parameters (temperat...
24/06/2025

Wuhan MECT specializes in the research of measurement and control technology of micro-environmental parameters (temperature, air pressure, humidity, cleanliness, noise, electromagnetic shielding, vacuum, etc.). For IC front-end lithography, optical measurement system, IC measurement equipment, bonding equipment and other top equipment and instruments, we provide leading micro-environmental control solutions, R&D services and supporting components to help customers solve complex technical problems and challenges, accelerating the R&D process of customer's top equipment and instruments, and comprehensively enhancing the competitiveness of customer's products in the market. Wuhan MECT aspires to become a global leader in the field of micro-environment control technology.
Please contact us:
+86 181 8642 5308
[email protected]

Wuhan MECT Officially Launches Overseas StrategyOn March 27, 2025, Wuhan Micro-Environment Control Technology Co., Ltd (...
24/04/2025

Wuhan MECT Officially Launches Overseas Strategy
On March 27, 2025, Wuhan Micro-Environment Control Technology Co., Ltd (hereinafter referred to as ‘Wuhan MECT’) signed an overseas strategic cooperation agreement with Singapore Akribis. According to the agreement, both parties will carry out in-depth co-operation based on their respective advantages, and promote the expansion and sales of Wuhan MECT's products in overseas markets based on the global sales network of Akribis, which covers the United States, Germany, South Korea, Japan, Singapore, Thailand, Israel, Malaysia and other countries and regions.
As a leading company focusing on Micro-Environment Control System solutions for cutting-edge equipments, Wuhan MECT provides complete Micro Environment Control System solutions for cutting-edge equipments such as projection photolithography, electron beam lithography, IC measurement equipment, optical inspection equipment, wafer bonding equipment, nano imprinting equipment, adhesive coating and developing equipment, nano-precision motion stage, cell synthesis equipment and so on. This cooperation marks an important step in the global development of Wuhan MEC, which will significantly enhance the influence of its products in the international market and inject new momentum for the company to achieve sustainable development.
Please contact us:
+86 181 8642 5308
[email protected]

24/03/2025

Wuhan MECT has successfully developed the first temperature-controlled FFU at home and abroad.

FFU (Fan Filter Unit) is a kind of equipment that integrates fan and filter together to improve air cleanliness through air supply filtration, which is widely used in the fields of semiconductor technological equipments, measuring equipments, and optical inspection equipments, etc. to meet the cleanliness requirements inside the equipments. With the continuous upgrading of technology, these devices not only require higher cleanliness, but also put forward more stringent requirements on the stability of the internal temperature. However, the current market FFU can not simultaneously meet the double demand for cleanliness and temperature stability.

For this industry pain point, Wuhan MECT has innovatively launched the first domestic and international temperature control FFU. On the condition of ambient temperature fluctuation ±2 ℃, the product can achieve ambient temperature fluctuations within the range of any set temperature of ± 0.1 ℃ stability. At the same time, its mechanical interface and electrical interface and the existing FFU are fully compatible, which can be a direct replacement for existing products, helping the industry to achieve the upgrading of the entire machine and equipment products.

Please contact us:
+86 181 8642 5308
[email protected]

04/03/2025

MECT Company developed the replacement for the original MEC system of foreign lithography machine.

Recently, Wuhan MECT Company signed an important contract. It will develop a new MEC system to replace the original MEC system of a foreign model photolithography machine. The system will realize the same temperature control, cleanliness control, heat extraction and heat dissipation functions and performance with the original system.
Since long time ago, the maintenance of used photolithography machine mainly relies on the services provided by foreign original factories. Companies usually use the original parts for replacement in the maintenance process. The new MEC system developed by Wuhan MECT Company adopts completely self-designed. All parts, software and control algorithms are not original products. And in the realization of the principle, the company has carried out innovation and optimization.
The signing of this contract marks Wuhan MECT Company's formal entry into the business field of replacing foreign photolithography MEC system. This breakthrough also extends the company's previous technology accumulation and successful experience - Wuhan MECT Company has already provided a full set of MEC system for a certain type of lithography and metrology equipment.

Please contact us:
+86 181 8642 5308
[email protected]

15/01/2025

MEC launches a mobile micro-environment control system that consists of ACR and ATC, providing both GAS and LAS.

The ACR can be moved as a whole, for easy lifting of the internal equipment.
Temperature stability up to ± 5mK (± 0.005 ℃)
Cleanliness can be improved by two levels, up to ISO Class1.
Air pressure stability: ±0.5Pa
Humidity stability: ±2%RH

Please contact us:
+86 181 8642 5308
[email protected]

07/01/2025

Wuhan MEC has grown rapidly in 2024.

Wuhan Micro-Environment Control Technology Co., Ltd. has achieved sales revenue of more than 20 million RMB in 2024, which exceeded the early year plan of 18 million RMB, with an year-on-year increase of 100%, a significant increase in synchronized profitability, extending the record of yearly profitability since its foundation.

The company completed its first round of financing, with investors from Akribis Precision Mechatronics (Shanghai) Co., Ltd. and Wuhan Guangchuang Equity Investment Fund Partnership (Limited Partnership).

The company developed the first domestic electromagnetic shielding system for electron beam lithography machine, which passed the customer's factory test and has been shipped to the customer. The performance indexes have reached the advanced level of similar products abroad.

The company signed the first overseas order to provide customers with air micro-environmental control system, achieving the air temperature stability, humidity stability, air cleanliness and other requirements required for the operation of customer's equipment, and successfully passed the customer's test and acceptance.

The company formally launched the industry's first All-In-One micro-environment control system products, providing air temperature control, water temperature control, humidity control and heat extraction at the same time, which can achieve better air temperature stability and flow field stability at the end of the object under dynamic conditions.

The company signed a contract of more than 8 million RMB for a domestic high-end integrated circuit equipment to provide micro-environment control system. The amount of this order refreshed the company's previous record of 5 million RMB of a single order.

The company also launched three new products for different application needs, i.e. horizontal face-shaped interferometer special micro-environment control system, dual-channel air temperature control cabinet, and ceiling-type micro-environment control system.

Please contact us:
+86 181 8642 5308
[email protected]

31/12/2024

MEC's First Overseas Project Received Successfully!

Wuhan Micro-Environment Control Technology Co., Ltd provides Singapore client with micro-environment system (Assembling Clean Room with Air Temperature Control Cabinet) , which has been received and tested successfully, meeting all the requirements of the customer.
The micro-environment system was independently researched and developed by MEC. The ACR provides global air shower and local air shower, which can improve the air cleanliness by two levels, and the noise is less than 55 dB(A). The local air shower temperature stability is up to ± 0.005 ℃, air pressure stability ± 0.5 Pa, humidity stability ± 2% RH.
The height of local air shower can be adjusted electrically, adapting to the height of different motion stages. The air outlet adopts the mask method, which can form a variety of air outlet structure and adapt to the different optical path layout of the interferometer. The mask can be made by self-adhesive paper engraving, with low cost and replacement time less than 0.5 hours.

Please contact us:
+86 181 8642 5308
[email protected]

We have officially launched the industry's first All-In-One MEC System product. The product provides air temperature con...
20/11/2024

We have officially launched the industry's first All-In-One MEC System product. The product provides air temperature control, water temperature control, humidity control and heat extraction at the same time. It is equivalent to the combination of air temperature control cabinet (ATC), water temperature control cabinet (TCU), humidity control cabinet and heat extraction cabinet. It is possible to realize better air temperature stability and flow field stability at the object end under dynamic conditions (operating state of the object equipment). A single temperature control cabinet or water temperature control cabinet can usually achieve better temperature stability and flow field stability under null conditions (no object equipment in the space) and under static conditions (no object equipment in operation). Stabilization under dynamic conditions requires a combination of several control cabinets as described above. The layout requires large floor space and is complex to implement. The All-In-One MEC System can achieve temperature stability of ±5mK (±0.005°C), solid temperature stability of ±3mK (±0.003°C) and humidity stability of ±1.0%RH under dynamic conditions.

The All-In-One MEC System provides users with three heat source control methods: water-cooling, heat extraction and air-cooling for the heat source of the equipment object. It can effectively prevent the unorganized spread of hot air. The combination of air in/out with water cooling/heat extraction enables the design of a more suitable localized air shower structure for the object equipment. It is conducive to the formation of a more stable flow field and temperature field. Thus achieving good performance under dynamic conditions. The system is suitable for equipment like optical surface shape interferometer and optical imaging quality test bench. The temperature stability, flow field stability and cleanliness under dynamic conditions have stringent requirements, but there are heat source interferences inside the equipment.

Please contact us:
+86 181 8642 5308
[email protected]

Address

No. 8, Ligou South Road, Donghu New Technology Development Zone
Wuhan
430223

Telephone

+8618186425308

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