09/03/2026
Getting a chip pattern to print exactly as intended starts long before high-volume manufacturing.
With holistic lithography, chipmakers can model, measure and refine their patterning choices before they ramp up production. By combining computational lithography, optical metrology and e-beam inspection with lithography systems, they can correct distortions, check pattern quality on test wafers and use those insights to fine-tune their process.
The result? Printed patterns that match the intended design as closely as possible.