13/08/2026
[Review]
Kinetics of thermal oxidation of silicon
2025 Appl. Phys. Express 18 120101
https://iopscience.iop.org/article/10.35848/1882-0786/ae1f5b
APEX-NEXT (Noteworthy Excellent Topics)
https://iopscience.iop.org/collections/apex-250923-01