06/09/2026
This is an ONYX-4DC mounted on an ISO-LF 160 Fl**ge. The target is directly cooled for more efficient thermal transfer which allows for high power continuous operation in production applications. This cathode is also equipped with an adjustable flex assembly for uniformity tuning in a confocal arrangement, a pneumatic shutter for startup cleaning of the target surface, and a process gas inlet / cross-contamination shield to prevent deposition on adjacent targets.